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Cell type TSP aligner article

 

Cell type TSP aligner
◦ Vision system
- Cognex. board
- Microscope : Dual scope & CCD

Conveyor moving system
 
Photo-litho / Exposure System / TSP - Cell type TSP aligner

 

  • specification
     
    • Sample size 4 ~ 7” square
    Alignment accuracy ± 1.5um
    Resolution L/S 5~8um (Aspect ratio below 1)
    Beam Intensity < 20mW/cm2 @ Broad band)
    Beam Uniformity < 5%

 

 



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Mask Aligner and Spin Coater equipment