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MDA-20000SA article
MDA-20000SA
Easy operation UI
PC Operation with PLC control
Image grab & Data log
More than 100 Program recipes
Motorized joystick control
Microscope position control system
 
Photo-litho / Exposure System / Manual - MDA-20000SA

 

  • specification
     
    • Type Semi-Auto (Joystick control)
    Mask size up to 610 x 610 (User spec.)
    Substrate size 500 x 500 (User spec.)
    UV lamp & Power 2kW & power supply
    5kW & Power supply
    Uniform beam size 600 x 600 (User spec.)
    Beam Uniformity <±7%
    Beam wavelength 350 ~ 450nm
    Process mode Soft, Hard contact & Proximity
    Substrate chuck moving x,y,z & θ (Motorized)
    Frame Anti-Vibration system
    Options UV Intensity meter
    etc.

 

 



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Mask Aligner and Spin Coater equipment