ReadyPlanet.com
  Home About us Products & Services Library Contact Us
dot dot
dot
Laser and Photonics
dot
bulletLaser Diode and DPSS Laser system
bulletHigh Power Tunable External Cavity Diode Lasers
bulletNd:YAG Laser Systems
bulletSpectral Products & CVI Laser
bulletExcimer Lasers
dot
Calibration and Measuring Instruments
dot
bulletGauge Calibration Instruments
dot
Flatness and Roughness Interferometer
dot
bulletCorning Tropel Interferometer system
bulletMask Aligner & Spin Coater equipment
dot
Imaging and Spectroscopy system
dot
bulletPCO Imaging High Performance Camera system
bulletCustomer Laser Spectroscopy and High Resolution Imaging System
dot
Industrial and Manufacturing
dot
MDA-400M article
MDA-400M
Easy operation & Installation
Handling Substrates of Various sizes
PLC control with Touch screen panel
 
Photo-litho / Exposure System / Manual - MDA-400M

 

  • specification
     
    • Type Manual (PLC control)
    Mask size up to 7" x 7"
    Substrate size piece to 6"
    UV lamp & Power 350W & power supply
    Uniform beam size 6.25" x 6.25"
    Beam Uniformity <±5%
    Beam wavelength 350 ~ 450nm
    365nm Intensity ~25mW/cm2
    Alignment accuracy 1um
    Process resolution 1um@1um PR thickness with vacuum contact
    Process mode Soft, Hard, Vacuum contact & Proximity
    Substrate chuck moving x,y,z & θ
    Options
    Anti-Vibration table
    IR BSA
    UV Intensity meter
    UV-LED(365nm) exposure module
    etc.

 

 



« Back


Mask Aligner and Spin Coater equipment
Copyright © 2010 All Rights Reserved.