MDA-60MS 
MDA-60MS |
Easy operation & Installation
PC Operation with PLC control
Image grab & Data log
More than 100 Program recipes |
|

|
- specification
Type |
Manual (PC control) |
Mask size |
up to 7" x 7" |
Substrate size |
piece to 6" x 6" |
UV lamp & Power |
1kW & power supply |
Uniform beam size |
7.25" x 7.25" |
Beam Uniformity |
<±5% |
Beam wavelength |
350 ~ 450nm |
365nm Intensity |
15 ~ 25mW/cm2 |
Alignment accuracy |
1um |
Process resolution |
1um@1um PR thickness with vacuum contact |
Process mode |
Soft, Hard, Vacuum contact & Proximity |
Substrate chuck moving |
x,y(Manual), z, θ (Motorized) |
Options |
CCD BSA |
UV Intensity meter |
etc. |
|
Frame |
Anti vibration table |
|
Mask Aligner and Spin Coater equipment