ReadyPlanet.com
dot dot
dot
Laser and Photonics
dot
bulletLaser Diode and DPSS Laser system
bulletHigh Power Tunable External Cavity Diode Lasers
bulletNd:YAG Laser Systems
bulletSpectral Products & CVI Laser
bulletExcimer Lasers
bulletSynrad Lasers
dot
Calibration and Measuring Instruments
dot
bulletGauge Calibration Instruments
dot
Flatness and Roughness Interferometer
dot
bulletCorning Tropel Interferometer system
bulletMask Aligner & Spin Coater equipment
dot
Imaging and Spectroscopy system
dot
bulletPCO Imaging High Performance Camera system
bulletCustomer Laser Spectroscopy and High Resolution Imaging System
bulletCryogenic
dot
Industrial and Manufacturing
dot




MDA-80SA article
MDA-80SA
Easy operation UI
PC Operation with PLC control
Image grab & Data log
More than 100 Program recipes
Motorized joystick control
 
Photo-litho / Exposure System / Manual - MDA-80SA

 

  • specification
     
  • Type Semi-Auto (Joystick control)
    Mask size up to 9" x 9"
    Substrate size piece to 8" x 8"
    UV lamp & Power 2kW & power supply
    Uniform beam size 10.25" x 10.25"
    Beam Uniformity <±3~5%
    Beam wavelength 350 ~ 450nm
    365nm Intensity 15 ~ 25mW/cm2
    Alignment accuracy 1um
    Process resolution 1um@1um PR thickness with vacuum contact
    Process mode Soft, Hard, Vacuum contact & Proximity
    Frame Anti-Vibration system
    Options
    CCD BSA
    UV Intensity meter
    etc.

 

 




Mask Aligner and Spin Coater equipment




Copyright © 2010 All Rights Reserved.