Spin-3000D 
Spin-3000D |
Compact unit for various coating solutions
Programmable Recipe management
Easy operation
Adopt Drain, Exhaust hole in bowl |
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- specification
Type |
Spin system |
Substrate size |
piece ~ up to 6" circle |
Rotation speed |
300 ~ 7,000rpm(@without load) an error of less than 1%
DC Servo Motor |
Spin state |
50steps, 20recipes (digital type) |
Bowl size |
12", Stainless steel |
Acceleration / Deceleration rate |
Variable |
Chuck material |
Anodized AL, Acetal |
Electric power |
220V, 5A |
Oiless vacuum pump pressure |
-650mmHg |
Dimensions(mm) |
390(D)x570(W)x280(H) |
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Mask Aligner and Spin Coater equipment