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Spin-3000D article
Spin-3000D
Compact unit for various coating solutions
Programmable Recipe management
Easy operation
Adopt Drain, Exhaust hole in bowl
 
Photo-litho / Spin System / Coating - Spin-3000D

 

  • specification
     
    • Type Spin system
    Substrate size piece ~ up to 6" circle
    Rotation speed 300 ~ 7,000rpm(@without load) an error of less than 1%

    DC Servo Motor
    Spin state 50steps, 20recipes (digital type)
    Bowl size 12", Stainless steel
    Acceleration / Deceleration rate Variable
    Chuck material Anodized AL, Acetal
    Electric power 220V, 5A
    Oiless vacuum pump pressure -650mmHg
    Dimensions(mm) 390(D)x570(W)x280(H)

 

 



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Mask Aligner and Spin Coater equipment
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