Spin-3000T ![article](lib_icon/icon0001.gif)
Spin-3000T |
Touch panel control
Compact unit for various coating solutions
PC Recipe management
Easy operation
Adopt Drain, Exhaust hole in bowl |
|
![Photo-litho / Spin System / Coating - Spin-3000T](http://www.midas-system.com/filebox/products_en/366ee546b0881da2efb784ea66ee6f97)
|
- specification
Type |
Spin system |
Substrate size |
piece ~ up to 8" circle |
Rotation speed |
AC Servo Motor(100W/400W) |
Spin state |
50steps, 20recipes (digital type) |
Bowl size |
12", Stainless steel |
Acceleration / Deceleration rate |
Variable |
Chuck material |
Anodized AL, Acetal |
Electric power |
220V, 5A |
Oiless vacuum pump pressure |
650mmHg |
Options |
Number of Dispenser nozzle |
Type of chemical |
Drain type |
etc. |
|
|
Mask Aligner and Spin Coater equipment