Spin-5000A ![article](lib_icon/icon0001.gif)
Spin-5000A |
Programmable Recipe management
Easy operation
Adopt Drain, Exhaust hole in bowl |
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![Photo-litho / Spin System / Coating - Spin-5000A](http://www.midas-system.com/filebox/products_en/16b1b626f17659c6229f2cb2efd89c8c)
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- specification
Type |
Spin system |
Substrate size |
piece ~ up to 12" circle |
Rotation speed |
AC Servo Motor (400W) |
Spin state |
50steps, 20recipes (digital type) |
Bowl size |
12", Stainless steel |
Acceleration / Deceleration rate |
Variable |
Chuck material |
Anodized AL, Acetal |
Electric power |
220V, 5A |
Oiless vacuum pump pressure |
-650mmHg |
Options |
Number of Dispenser nozzle |
Type of chemical |
Drain type |
etc. |
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Mask Aligner and Spin Coater equipment