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Manual article

 

  MDA-400LJ MDA-400M MDA-150 (FM) MDA-60MS
MDA-400LJ MDA-400M MDA-150 MDA-60MS
Type Fully manual Manual (PLC control) Fully manual Manual Manual (PC control)
Mask size up to 5" x 5" up to 7" x 7" up to 5" x 5" up to 7" x 7" up to 7" x 7"
Substrate size piece to 4" dia piece to 6" piece to 4" piece to 6" piece to 6" x 6"
UV lamp & Power UV-LED & power supply 350W & power supply 350W & Digital power supply 500W, 1kW & Digital power supply 1kW & power supply
Uniform beam size 125mm dia 6.25" x 6.25" 6.25" x 6.25" 6.25" x 6.25 7.25" x 7.25"
Beam Uniformity <±3% <±5% <±3% <±5% <±5%
Beam wavelength 365nm Only 350 ~ 450nm 350 ~ 450nm 350 ~ 450nm 350 ~ 450nm
365nm Intensity ~20mW/cm2 ~25mW/cm2 ~30mW/cm2 ~50mW/cm2 15 ~ 25mW/cm2
Alignment accuracy 1um 1um 1um 1um 1um
Process resolution 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact
Process mode Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ  x,y,z & θ  x,y,z & θ x,y,z & θ (motorized) x,y(Manual), z, θ (Motorized)
Options etc. Anti-Vibration table
IR BSA
UV Intensity meter
UV-LED(365nm) exposure module
etc.		 IR BSA
UV Intensity meter
etc.		 CCD BSA CCD BSA
UV Intensity meter
etc.
Frame  •  •  •  • Anti vibration table

 

 

 

 

  MDA-80SA MDA-12SA MDA-20000SA
MDA-80SA MDA-12SA MDA-20000SA
Type Semi-Auto (Joystick control) Semi-Auto (Joystick control) Semi-Auto (Joystick control)
Mask size up to 9" x 9" up to 13" x 13" up to 610 x 610 (User spec.)
Substrate size piece to 8" x 8" piece to 12" x 12" 500 x 500 (User spec.)
UV lamp & Power 2kW & power supply 2kW & power supply
5kW & Power supply		 2kW & power supply
5kW & Power supply
Uniform beam size 10.25" x 10.25" 13.25" x 13.25" 600 x 600 (User spec.)
Beam Uniformity <±3~5% <±5% <±7%
Beam wavelength 350 ~ 450nm 350 ~ 450nm 350 ~ 450nm
365nm Intensity 15 ~ 25mW/cm2 15 ~ 20mW/cm2 (2kW)
25 ~ 60mW/cm2 (5kW)		 •
Alignment accuracy 1um 1um •
Process resolution 1um@1um PR thickness with vacuum contact 1um@1um PR thickness with vacuum contact •
Process mode Soft, Hard, Vacuum contact & Proximity Soft, Hard, Vacuum contact & Proximity Soft, Hard contact & Proximity
Substrate chuck moving x,y,z & θ (Motorized) x,y,z & θ (Motorized) x,y,z & θ (Motorized)
Frame Anti-Vibration system Anti-Vibration system Anti-Vibration system
Options CCD BSA
UV Intensity meter
etc.		 CCD BSA
UV Intensity meter
etc.		 UV Intensity meter
etc.

 



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Mask Aligner and Spin Coater equipment